Model-based image data processing system
ACIS
ACIS is a system used to compare actual microscopy image with ideal image created from design pattern data.
Algorithm Development
Realizing ALITECS idea
ACIS is a system used to compare actual microscopy image with ideal image created from design pattern data.
AEOs is a highly functional simulation tool for use in the performance evaluation and optimization of electron beam lithography systems, as well as in the simulation of exposure processes.
ALITECS is a distributor of a variety of TOOL products, including Lavis (a high-speed layout data viewer) and MaskStudio (a system for converting layout design data into mask writing data).
Advanced optical systems for semiconductor manufacturing processes