Model-based image data processing system
ACIS

ACIS is a system used to compare actual microscopy image with ideal image created from design pattern data.

 

1. ALITECS Reference Image Generator (RIG) for ACIS
   「ACIS: ALITECS Computational Inspection System: RIG “ALITECS Reference Image Generator”」
2. ALITECS Computational Inspection System (SIP) for ACIS
   「ACIS: ALITECS Computational Inspection System: SIP “ALITECS Software defined Image Processor”」